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Case Studies

It’s All About DATA

HPM Library

AMHS

  • RECIF SORT BATCH FLIP
  • OLYMPUS SCOPE

 

PVD

  • AMAT ENDURA PVD DeGAS
  • AMAT ENDURA PVD TiN
  • AMAT ENDURA ALD/PVD
  • ANELVA ILC-1060
  • LAM INOVA NeXT
  • LAM VECTOR STRATA
  • ULVAC ENTRON-EX

CVD

  • AMAT CENTURA POLYGEN LPCVD
  • AMAT CENTURA SiNgen LPCVD
  • AMAT CENTURA ULTIMA-X HDP-CVD
  • AMAT ENDURA Al CVD/PVD
  • AMAT PRODUCER GT PECVD
  • AMAT PRODUCER SACVD
  • EPIStar PECVD OXFORD
  • LAM ALTUS MAX
  • LAM GAMMA GxT
  • LAM SPEED MAX/NeXT
  • LAM VECTOR
  • TEL TiN TRIASe+ EX-II TiN
  • PLASMATHERM VERSALOCK PECVD

ETCH

  • AMAT CENTURA 300 METAL ETCH DPS
  • AMAT CENTURA eMAX DIELECTRIC ETCH
  • AMAT OPUS AvantEdge METAL ETCH
  • AMAT PRODUCER ETCH
  • HITACHI CONDUCTOR ETCH
  • LAM 2300 VERSYS KIYO
  • LAM 2300 KIYO POLY
  • LAM 2300 EXELAN FLEX
  • LAM 2300 DSiE
  • OERLIKON CLN 300 ICP ETCH
  • PLASMATHERM VERSALINE RIE ETCH
  • PLASMATHERM VERSALINE ICP ETCH
  • STS MULTIPLEX ICP AOE
  • STS MULTIPLEX DEEP REACTIVE ION ETCHER
  • TEL VIGAS PLASMA ETCH

IMPLANT

  • AMAT HC QUANTUM X
  • AMAT VIISta 3000XP
  • AMAT VIISta 900 3D
  • AMAT VIISta 900 XP
  • AMAT VIISta HCP
  • AMAT VIISta TRIDENT
  • AMAT PLAD
  • AXCELIS HC PURION H
  • AXCELIS HC OPTIMA HDx
  • AXCELIS HE PARADIGN XE
  • AXCELIS MC PURION M
  • NISSIN EXCEED

METROLOGY

  • AMAT VeritySEM 2

 

PHOTO

  • TEL CLEANTRACK LITHIUS PRO/LITHIUS i+
  • TEL CLEANTRACK BARC
  • SCREEN DT-3000
  • SCREEN RF-310A

 

POLISH

  • AMAT REFLEXION LK CMP
  • AMAT REFLEXION LK Cu CMP

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ETCH

  • AMAT CENTURA DPS
  • AMAT CENTURA 5200 ETCH
  • HITACHI CONDUCTOR ETCH
  • HITACHI EMCP ETCH
  • LAM 4400 RAINBOW
  • LAM 4520
  • LAM 490
  • LAM 9600 VAT VALVE
  • LAM TCP 9400
  • LAM TCP 9600

CVD

  • AMAT ENDURA CVD
  • AMAT CENTURA HDP-CVD
  • AMAT P5000 CVD
  • LAM CONCEPT 1/CONCEPT 2
  • LAM SPEED 2
  • LAM ALTUS WCVD
  • TEL UNITY Me

PHOTO

  • TEL CLEANTRACK ACT 8
  • TEL CLEANTRACK BARC

 

DIFFUSION

  • KOKUSAI VERTRON-III

 

PVD

  • AMAT ENDURA PVD
  • ASM APOLLO

IMPLANT

  • AMAT 9500
  • AMAT XR80
  • AMAT QUANTUM LEAP
  • AMAT VIISion 80
  • AXCELIS GSD
  • AXCELIS HC PURION H
  • AXCELIS HE PARADIGN XE
  • AXCELIS MC PURION M
  • AXCELIS NV-10

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MOCVD

  • AIXTRON 2400/2600
  • AIXTRON GRAPHITE SUSCEPTOR

CVD

  • PLASMATHERM VERSALINE PECVD

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COATER

  • DAVIDSON WILDER

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INTEVAC 200L

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PHOTO

  • TOK TOP PLATE

IMPLANT

  • NISSIN iG

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PRINTED CIRCUIT BOARD

  • SCREEN PRINT
  • THICK FILM PASTE/INK MANUFACTURING
  • THREE ROLL-MILL

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