1^st Pass Technologies High Precision Maintenance procedure

VALUE:

• Safely remove hardened deposition in a timely manner
• Improve post PM particle performance
• Improve First Pass post PM Qualification rates
• Extend Mean Time Between Cleans (MTBC)

CLIENT: Advanced Chip Manufacturer
MODULE:  CVD

DATA:

• Reduction PM downtime: 2 Hours
• Post PM Particle Total Count: 38% Reduction
• Post PM Particle Area Count: 24% Reduction
• 1^st Pass QUAL rate: 27% Improvement