1^st Pass Technologies High Precision Maintenance procedure

VALUE:

• Safely remove deposition in a timely manner
• Improve post PM particle performance
•  Improve 1^st Pass Qualifications
•  Extend Mean Time Between Clean (MTBC)

CLIENT: Advanced Chip Manufacturer
MODULE: Implant

DATA:

• Reduction PM downtime: 12 Hours
• Post PM Particle Total Count: 47% Reduction
• Post PM Particle Area Count: 23% Reduction
• 1^st Pass QUAL rate: 32% Improvement