VALUE:

• Safely remove baked on resist in a timely manner
• Improve post PM particle performance
• Improve 1^st Pass Qualification rates
• Extend Mean Time Between Cleans (MTBC)

CLIENT: Advanced Chip Manufacturer
MODULE: PVD

DATA:

• Reduction PM downtime: 90 Minutes
• Post PM Particle Total Count: 52% Reduction
• Post PM Particle Area Count: 30% Reduction
• 1^st Pass QUAL rate: 37% Improvement